5/30/2010	12:12:27 AM	Helium valve closed
5/30/2010	12:12:27 AM	H2 valve closed
5/30/2010	12:12:27 AM	BCl3 valve closed
5/30/2010	12:12:27 AM	PH3 valve closed
5/30/2010	12:12:27 AM	SiCl4 pre valve closed
5/30/2010	12:12:27 AM	SiCl4 post valve closed
5/30/2010	12:12:27 AM	Main Vac valve closed
5/30/2010	12:12:27 AM	Bypass valve closed
5/30/2010	12:12:27 AM	Bubbler valve closed
5/30/2010	12:12:27 AM	Helium MFC set to  0.000000
5/30/2010	12:12:27 AM	H2 MFC set to  0.000000
5/30/2010	12:12:27 AM	BCl3 MFC set to  0.000000
5/30/2010	12:12:27 AM	PHl3 MFC set to  0.000000
5/30/2010	12:12:27 AM	SiCl4 MFC set to  0.000000
5/30/2010	12:12:27 AM	Bypass solenoid MFC set to  0.000000
5/30/2010	12:12:27 AM	Tube furnace set to 0
5/30/2010	12:12:28 AM	Run finished at 12:12 AM
5/30/2010	12:20:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2010	12:20:41 AM	Recipe started at 12:20 AM
5/30/2010	12:20:41 AM	Helium valve closed
5/30/2010	12:20:41 AM	H2 valve closed
5/30/2010	12:20:41 AM	BCl3 valve closed
5/30/2010	12:20:41 AM	PH3 valve closed
5/30/2010	12:20:41 AM	SiCl4 pre valve closed
5/30/2010	12:20:41 AM	SiCl4 post valve closed
5/30/2010	12:20:41 AM	Main Vac valve closed
5/30/2010	12:20:41 AM	Bubbler valve closed
5/30/2010	12:20:41 AM	Bypass valve opened
5/30/2010	12:20:41 AM	Helium MFC set to  0.000000
5/30/2010	12:20:41 AM	H2 MFC set to  0.000000
5/30/2010	12:20:41 AM	BCl3 MFC set to  0.000000
5/30/2010	12:20:41 AM	PHl3 MFC set to  0.000000
5/30/2010	12:20:41 AM	SiCl4 MFC set to  0.000000
5/30/2010	12:20:41 AM	Bypass solenoid MFC set to  0.000000
5/30/2010	12:20:42 AM	Tube furnace set to 0
5/30/2010	12:21:26 AM	Helium valve closed
5/30/2010	12:21:26 AM	H2 valve closed
5/30/2010	12:21:26 AM	BCl3 valve closed
5/30/2010	12:21:26 AM	PH3 valve closed
5/30/2010	12:21:26 AM	SiCl4 pre valve closed
5/30/2010	12:21:26 AM	SiCl4 post valve closed
5/30/2010	12:21:26 AM	Bubbler valve closed
5/30/2010	12:21:26 AM	Main Vac valve opened
5/30/2010	12:21:26 AM	Bypass valve opened
5/30/2010	12:21:26 AM	Helium MFC set to  0.000000
5/30/2010	12:21:26 AM	H2 MFC set to  0.000000
5/30/2010	12:21:26 AM	BCl3 MFC set to  0.000000
5/30/2010	12:21:26 AM	PHl3 MFC set to  0.000000
5/30/2010	12:21:26 AM	SiCl4 MFC set to  0.000000
5/30/2010	12:21:26 AM	Bypass solenoid MFC set to  0.000000
5/30/2010	12:21:26 AM	Tube furnace set to 0
5/30/2010	12:21:27 AM	Run finished at 12:21 AM
5/30/2010	12:21:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2010	12:59:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/30/2010	12:59:54 PM	Recipe started at 12:59 PM
5/30/2010	12:59:54 PM	H2 valve closed
5/30/2010	12:59:54 PM	BCl3 valve closed
5/30/2010	12:59:54 PM	PH3 valve closed
5/30/2010	12:59:54 PM	SiCl4 pre valve closed
5/30/2010	12:59:54 PM	SiCl4 post valve closed
5/30/2010	12:59:54 PM	Main Vac valve closed
5/30/2010	12:59:54 PM	Bypass valve closed
5/30/2010	12:59:54 PM	Bubbler valve closed
5/30/2010	12:59:54 PM	Helium valve opened
5/30/2010	12:59:54 PM	Helium MFC set to  500.000000
5/30/2010	12:59:54 PM	H2 MFC set to  0.000000
5/30/2010	12:59:54 PM	BCl3 MFC set to  0.000000
5/30/2010	12:59:54 PM	PHl3 MFC set to  0.000000
5/30/2010	12:59:54 PM	SiCl4 MFC set to  0.000000
5/30/2010	12:59:54 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	12:59:55 PM	Tube furnace set to 0
5/30/2010	1:01:15 PM	Helium valve closed
5/30/2010	1:01:15 PM	H2 valve closed
5/30/2010	1:01:15 PM	BCl3 valve closed
5/30/2010	1:01:15 PM	PH3 valve closed
5/30/2010	1:01:15 PM	SiCl4 pre valve closed
5/30/2010	1:01:15 PM	SiCl4 post valve closed
5/30/2010	1:01:15 PM	Main Vac valve closed
5/30/2010	1:01:15 PM	Bypass valve closed
5/30/2010	1:01:15 PM	Bubbler valve closed
5/30/2010	1:01:15 PM	Helium MFC set to  0.000000
5/30/2010	1:01:15 PM	H2 MFC set to  0.000000
5/30/2010	1:01:15 PM	BCl3 MFC set to  0.000000
5/30/2010	1:01:15 PM	PHl3 MFC set to  0.000000
5/30/2010	1:01:15 PM	SiCl4 MFC set to  0.000000
5/30/2010	1:01:15 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	1:01:15 PM	Tube furnace set to 0
5/30/2010	1:01:15 PM	Run finished at 1:01 PM
5/30/2010	1:01:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/30/2010	1:11:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2010	1:11:26 PM	Recipe started at 1:11 PM
5/30/2010	1:11:26 PM	Helium valve closed
5/30/2010	1:11:26 PM	H2 valve closed
5/30/2010	1:11:26 PM	BCl3 valve closed
5/30/2010	1:11:26 PM	PH3 valve closed
5/30/2010	1:11:26 PM	SiCl4 pre valve closed
5/30/2010	1:11:26 PM	SiCl4 post valve closed
5/30/2010	1:11:26 PM	Main Vac valve closed
5/30/2010	1:11:26 PM	Bubbler valve closed
5/30/2010	1:11:26 PM	Bypass valve opened
5/30/2010	1:11:26 PM	Helium MFC set to  0.000000
5/30/2010	1:11:26 PM	H2 MFC set to  0.000000
5/30/2010	1:11:26 PM	BCl3 MFC set to  0.000000
5/30/2010	1:11:26 PM	PHl3 MFC set to  0.000000
5/30/2010	1:11:26 PM	SiCl4 MFC set to  0.000000
5/30/2010	1:11:26 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	1:11:26 PM	Tube furnace set to 0
5/30/2010	1:12:13 PM	Helium valve closed
5/30/2010	1:12:13 PM	H2 valve closed
5/30/2010	1:12:13 PM	BCl3 valve closed
5/30/2010	1:12:13 PM	PH3 valve closed
5/30/2010	1:12:13 PM	SiCl4 pre valve closed
5/30/2010	1:12:13 PM	SiCl4 post valve closed
5/30/2010	1:12:13 PM	Bubbler valve closed
5/30/2010	1:12:13 PM	Main Vac valve opened
5/30/2010	1:12:13 PM	Bypass valve opened
5/30/2010	1:12:13 PM	Helium MFC set to  0.000000
5/30/2010	1:12:13 PM	H2 MFC set to  0.000000
5/30/2010	1:12:13 PM	BCl3 MFC set to  0.000000
5/30/2010	1:12:13 PM	PHl3 MFC set to  0.000000
5/30/2010	1:12:13 PM	SiCl4 MFC set to  0.000000
5/30/2010	1:12:13 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	1:12:13 PM	Tube furnace set to 0
5/30/2010	1:12:14 PM	Run finished at 1:12 PM
5/30/2010	1:12:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2010	1:18:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/30/2010	1:19:05 PM	Recipe started at 1:19 PM
5/30/2010	1:19:05 PM	H2 valve closed
5/30/2010	1:19:05 PM	BCl3 valve closed
5/30/2010	1:19:05 PM	PH3 valve closed
5/30/2010	1:19:05 PM	SiCl4 pre valve closed
5/30/2010	1:19:05 PM	SiCl4 post valve closed
5/30/2010	1:19:05 PM	Main Vac valve closed
5/30/2010	1:19:05 PM	Bypass valve closed
5/30/2010	1:19:05 PM	Bubbler valve closed
5/30/2010	1:19:05 PM	Helium valve opened
5/30/2010	1:19:05 PM	Helium MFC set to  500.000000
5/30/2010	1:19:05 PM	H2 MFC set to  0.000000
5/30/2010	1:19:05 PM	BCl3 MFC set to  0.000000
5/30/2010	1:19:05 PM	PHl3 MFC set to  0.000000
5/30/2010	1:19:05 PM	SiCl4 MFC set to  0.000000
5/30/2010	1:19:05 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	1:19:05 PM	Tube furnace set to 0
5/30/2010	1:20:27 PM	Helium valve closed
5/30/2010	1:20:27 PM	H2 valve closed
5/30/2010	1:20:27 PM	BCl3 valve closed
5/30/2010	1:20:27 PM	PH3 valve closed
5/30/2010	1:20:27 PM	SiCl4 pre valve closed
5/30/2010	1:20:27 PM	SiCl4 post valve closed
5/30/2010	1:20:27 PM	Main Vac valve closed
5/30/2010	1:20:27 PM	Bypass valve closed
5/30/2010	1:20:27 PM	Bubbler valve closed
5/30/2010	1:20:27 PM	Helium MFC set to  0.000000
5/30/2010	1:20:27 PM	H2 MFC set to  0.000000
5/30/2010	1:20:27 PM	BCl3 MFC set to  0.000000
5/30/2010	1:20:27 PM	PHl3 MFC set to  0.000000
5/30/2010	1:20:27 PM	SiCl4 MFC set to  0.000000
5/30/2010	1:20:27 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	1:20:27 PM	Tube furnace set to 0
5/30/2010	1:20:42 PM	Helium valve closed
5/30/2010	1:20:42 PM	H2 valve closed
5/30/2010	1:20:42 PM	BCl3 valve closed
5/30/2010	1:20:42 PM	PH3 valve closed
5/30/2010	1:20:42 PM	SiCl4 pre valve closed
5/30/2010	1:20:42 PM	SiCl4 post valve closed
5/30/2010	1:20:42 PM	Main Vac valve closed
5/30/2010	1:20:42 PM	Bubbler valve closed
5/30/2010	1:20:42 PM	Bypass valve opened
5/30/2010	1:20:42 PM	Helium MFC set to  0.000000
5/30/2010	1:20:42 PM	H2 MFC set to  0.000000
5/30/2010	1:20:42 PM	BCl3 MFC set to  0.000000
5/30/2010	1:20:42 PM	PHl3 MFC set to  0.000000
5/30/2010	1:20:42 PM	SiCl4 MFC set to  0.000000
5/30/2010	1:20:42 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	1:20:43 PM	Tube furnace set to 0
5/30/2010	1:21:16 PM	Helium valve closed
5/30/2010	1:21:16 PM	H2 valve closed
5/30/2010	1:21:16 PM	BCl3 valve closed
5/30/2010	1:21:16 PM	PH3 valve closed
5/30/2010	1:21:16 PM	SiCl4 pre valve closed
5/30/2010	1:21:16 PM	SiCl4 post valve closed
5/30/2010	1:21:16 PM	Bubbler valve closed
5/30/2010	1:21:16 PM	Main Vac valve opened
5/30/2010	1:21:16 PM	Bypass valve opened
5/30/2010	1:21:16 PM	Helium MFC set to  0.000000
5/30/2010	1:21:16 PM	H2 MFC set to  0.000000
5/30/2010	1:21:16 PM	BCl3 MFC set to  0.000000
5/30/2010	1:21:16 PM	PHl3 MFC set to  0.000000
5/30/2010	1:21:16 PM	SiCl4 MFC set to  0.000000
5/30/2010	1:21:16 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	1:21:16 PM	Tube furnace set to 0
5/30/2010	1:26:16 PM	H2 valve closed
5/30/2010	1:26:16 PM	BCl3 valve closed
5/30/2010	1:26:16 PM	PH3 valve closed
5/30/2010	1:26:16 PM	SiCl4 pre valve closed
5/30/2010	1:26:16 PM	SiCl4 post valve closed
5/30/2010	1:26:16 PM	Main Vac valve closed
5/30/2010	1:26:16 PM	Bypass valve closed
5/30/2010	1:26:16 PM	Bubbler valve closed
5/30/2010	1:26:16 PM	Helium valve opened
5/30/2010	1:26:16 PM	Helium MFC set to  500.000000
5/30/2010	1:26:16 PM	H2 MFC set to  0.000000
5/30/2010	1:26:16 PM	BCl3 MFC set to  0.000000
5/30/2010	1:26:16 PM	PHl3 MFC set to  0.000000
5/30/2010	1:26:16 PM	SiCl4 MFC set to  0.000000
5/30/2010	1:26:16 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	1:26:16 PM	Tube furnace set to 0
5/30/2010	1:27:39 PM	Helium valve closed
5/30/2010	1:27:39 PM	H2 valve closed
5/30/2010	1:27:39 PM	BCl3 valve closed
5/30/2010	1:27:39 PM	PH3 valve closed
5/30/2010	1:27:39 PM	SiCl4 pre valve closed
5/30/2010	1:27:39 PM	SiCl4 post valve closed
5/30/2010	1:27:39 PM	Main Vac valve closed
5/30/2010	1:27:39 PM	Bypass valve closed
5/30/2010	1:27:39 PM	Bubbler valve closed
5/30/2010	1:27:39 PM	Helium MFC set to  0.000000
5/30/2010	1:27:39 PM	H2 MFC set to  0.000000
5/30/2010	1:27:39 PM	BCl3 MFC set to  0.000000
5/30/2010	1:27:39 PM	PHl3 MFC set to  0.000000
5/30/2010	1:27:39 PM	SiCl4 MFC set to  0.000000
5/30/2010	1:27:39 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	1:27:39 PM	Tube furnace set to 0
5/30/2010	1:27:54 PM	Helium valve closed
5/30/2010	1:27:54 PM	H2 valve closed
5/30/2010	1:27:54 PM	BCl3 valve closed
5/30/2010	1:27:54 PM	PH3 valve closed
5/30/2010	1:27:54 PM	SiCl4 pre valve closed
5/30/2010	1:27:54 PM	SiCl4 post valve closed
5/30/2010	1:27:54 PM	Main Vac valve closed
5/30/2010	1:27:54 PM	Bubbler valve closed
5/30/2010	1:27:54 PM	Bypass valve opened
5/30/2010	1:27:54 PM	Helium MFC set to  0.000000
5/30/2010	1:27:54 PM	H2 MFC set to  0.000000
5/30/2010	1:27:54 PM	BCl3 MFC set to  0.000000
5/30/2010	1:27:54 PM	PHl3 MFC set to  0.000000
5/30/2010	1:27:54 PM	SiCl4 MFC set to  0.000000
5/30/2010	1:27:54 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	1:27:54 PM	Tube furnace set to 0
5/30/2010	1:28:28 PM	Helium valve closed
5/30/2010	1:28:28 PM	H2 valve closed
5/30/2010	1:28:28 PM	BCl3 valve closed
5/30/2010	1:28:28 PM	PH3 valve closed
5/30/2010	1:28:28 PM	SiCl4 pre valve closed
5/30/2010	1:28:28 PM	SiCl4 post valve closed
5/30/2010	1:28:28 PM	Bubbler valve closed
5/30/2010	1:28:28 PM	Main Vac valve opened
5/30/2010	1:28:28 PM	Bypass valve opened
5/30/2010	1:28:28 PM	Helium MFC set to  0.000000
5/30/2010	1:28:28 PM	H2 MFC set to  0.000000
5/30/2010	1:28:28 PM	BCl3 MFC set to  0.000000
5/30/2010	1:28:28 PM	PHl3 MFC set to  0.000000
5/30/2010	1:28:28 PM	SiCl4 MFC set to  0.000000
5/30/2010	1:28:28 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	1:28:28 PM	Tube furnace set to 0
5/30/2010	1:33:28 PM	H2 valve closed
5/30/2010	1:33:28 PM	BCl3 valve closed
5/30/2010	1:33:28 PM	PH3 valve closed
5/30/2010	1:33:28 PM	SiCl4 pre valve closed
5/30/2010	1:33:28 PM	SiCl4 post valve closed
5/30/2010	1:33:28 PM	Main Vac valve closed
5/30/2010	1:33:28 PM	Bypass valve closed
5/30/2010	1:33:28 PM	Bubbler valve closed
5/30/2010	1:33:28 PM	Helium valve opened
5/30/2010	1:33:28 PM	Helium MFC set to  500.000000
5/30/2010	1:33:28 PM	H2 MFC set to  0.000000
5/30/2010	1:33:28 PM	BCl3 MFC set to  0.000000
5/30/2010	1:33:28 PM	PHl3 MFC set to  0.000000
5/30/2010	1:33:28 PM	SiCl4 MFC set to  0.000000
5/30/2010	1:33:28 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	1:33:28 PM	Tube furnace set to 0
5/30/2010	1:34:51 PM	Helium valve closed
5/30/2010	1:34:51 PM	H2 valve closed
5/30/2010	1:34:51 PM	BCl3 valve closed
5/30/2010	1:34:51 PM	PH3 valve closed
5/30/2010	1:34:51 PM	SiCl4 pre valve closed
5/30/2010	1:34:51 PM	SiCl4 post valve closed
5/30/2010	1:34:51 PM	Main Vac valve closed
5/30/2010	1:34:51 PM	Bypass valve closed
5/30/2010	1:34:51 PM	Bubbler valve closed
5/30/2010	1:34:51 PM	Helium MFC set to  0.000000
5/30/2010	1:34:51 PM	H2 MFC set to  0.000000
5/30/2010	1:34:51 PM	BCl3 MFC set to  0.000000
5/30/2010	1:34:51 PM	PHl3 MFC set to  0.000000
5/30/2010	1:34:51 PM	SiCl4 MFC set to  0.000000
5/30/2010	1:34:51 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	1:34:51 PM	Tube furnace set to 0
5/30/2010	1:35:06 PM	Helium valve closed
5/30/2010	1:35:06 PM	H2 valve closed
5/30/2010	1:35:06 PM	BCl3 valve closed
5/30/2010	1:35:06 PM	PH3 valve closed
5/30/2010	1:35:06 PM	SiCl4 pre valve closed
5/30/2010	1:35:06 PM	SiCl4 post valve closed
5/30/2010	1:35:06 PM	Main Vac valve closed
5/30/2010	1:35:06 PM	Bubbler valve closed
5/30/2010	1:35:06 PM	Bypass valve opened
5/30/2010	1:35:06 PM	Helium MFC set to  0.000000
5/30/2010	1:35:06 PM	H2 MFC set to  0.000000
5/30/2010	1:35:06 PM	BCl3 MFC set to  0.000000
5/30/2010	1:35:06 PM	PHl3 MFC set to  0.000000
5/30/2010	1:35:06 PM	SiCl4 MFC set to  0.000000
5/30/2010	1:35:06 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	1:35:06 PM	Tube furnace set to 0
5/30/2010	1:35:40 PM	Helium valve closed
5/30/2010	1:35:40 PM	H2 valve closed
5/30/2010	1:35:40 PM	BCl3 valve closed
5/30/2010	1:35:40 PM	PH3 valve closed
5/30/2010	1:35:40 PM	SiCl4 pre valve closed
5/30/2010	1:35:40 PM	SiCl4 post valve closed
5/30/2010	1:35:40 PM	Bubbler valve closed
5/30/2010	1:35:40 PM	Main Vac valve opened
5/30/2010	1:35:40 PM	Bypass valve opened
5/30/2010	1:35:40 PM	Helium MFC set to  0.000000
5/30/2010	1:35:40 PM	H2 MFC set to  0.000000
5/30/2010	1:35:40 PM	BCl3 MFC set to  0.000000
5/30/2010	1:35:40 PM	PHl3 MFC set to  0.000000
5/30/2010	1:35:40 PM	SiCl4 MFC set to  0.000000
5/30/2010	1:35:40 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	1:35:40 PM	Tube furnace set to 0
5/30/2010	1:40:40 PM	Helium valve closed
5/30/2010	1:40:40 PM	H2 valve closed
5/30/2010	1:40:40 PM	BCl3 valve closed
5/30/2010	1:40:40 PM	PH3 valve closed
5/30/2010	1:40:40 PM	SiCl4 pre valve closed
5/30/2010	1:40:40 PM	SiCl4 post valve closed
5/30/2010	1:40:40 PM	Bubbler valve closed
5/30/2010	1:40:40 PM	Main Vac valve opened
5/30/2010	1:40:40 PM	Bypass valve opened
5/30/2010	1:40:40 PM	Helium MFC set to  0.000000
5/30/2010	1:40:40 PM	H2 MFC set to  0.000000
5/30/2010	1:40:40 PM	BCl3 MFC set to  0.000000
5/30/2010	1:40:40 PM	PHl3 MFC set to  0.000000
5/30/2010	1:40:40 PM	SiCl4 MFC set to  0.000000
5/30/2010	1:40:40 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	1:40:40 PM	Tube furnace set to 0
5/30/2010	1:40:41 PM	Run finished at 1:40 PM
5/30/2010	1:40:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/30/2010	2:27:37 PM	Helium MFC set to  100.000000
5/30/2010	2:27:38 PM	Helium valve opened
5/30/2010	2:36:26 PM	Helium valve closed
5/30/2010	2:36:28 PM	Helium MFC set to  0.000000
5/30/2010	2:38:29 PM	Tube furnace set to 100
5/30/2010	2:39:13 PM	Bypass valve closed
5/30/2010	2:39:13 PM	Main Vac valve closed
5/30/2010	2:39:24 PM	Bypass valve opened
5/30/2010	2:39:24 PM	Main Vac valve opened
5/30/2010	2:41:20 PM	Tube furnace set to 0
5/30/2010	2:41:48 PM	Recipe started at 2:41 PM
5/30/2010	2:41:48 PM	Helium valve closed
5/30/2010	2:41:48 PM	BCl3 valve closed
5/30/2010	2:41:48 PM	PH3 valve closed
5/30/2010	2:41:48 PM	SiCl4 pre valve closed
5/30/2010	2:41:48 PM	SiCl4 post valve closed
5/30/2010	2:41:48 PM	Main Vac valve closed
5/30/2010	2:41:48 PM	Bypass valve closed
5/30/2010	2:41:48 PM	Bubbler valve closed
5/30/2010	2:41:48 PM	H2 valve opened
5/30/2010	2:41:48 PM	Error setting the  Helium MFC to 0.000000
5/30/2010	2:41:50 PM	Error setting the  H2 MFC to 500.000000
5/30/2010	2:41:52 PM	Error setting the  BCl3 MFC to 0.000000
5/30/2010	2:41:52 PM	PHl3 MFC set to  0.000000
5/30/2010	2:41:52 PM	SiCl4 MFC set to  0.000000
5/30/2010	2:41:52 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	2:41:52 PM	Tube furnace set to 0
5/30/2010	2:42:01 PM	Run aborted at 2:42 PM
5/30/2010	2:42:01 PM	Helium valve closed
5/30/2010	2:42:01 PM	H2 valve closed
5/30/2010	2:42:01 PM	BCl3 valve closed
5/30/2010	2:42:01 PM	PH3 valve closed
5/30/2010	2:42:01 PM	SiCl4 pre valve closed
5/30/2010	2:42:01 PM	SiCl4 post valve closed
5/30/2010	2:42:01 PM	Bypass valve closed
5/30/2010	2:42:01 PM	Main Vac valve closed
5/30/2010	2:42:01 PM	Bubbler valve closed
5/30/2010	2:42:01 PM	Error setting the  Helium MFC to 0.000000
5/30/2010	2:42:02 PM	Error setting the  H2 MFC to 0.000000
5/30/2010	2:42:02 PM	Error setting the  BCl3 MFC to 0.000000
5/30/2010	2:42:03 PM	PHl3 MFC set to  0.000000
5/30/2010	2:42:03 PM	SiCl4 MFC set to  0.000000
5/30/2010	2:42:03 PM	Tube furnace set to 0
5/30/2010	2:42:13 PM	Bypass valve opened
5/30/2010	2:42:14 PM	Main Vac valve opened
5/30/2010	2:42:20 PM	Program exited cleanly
5/30/2010	2:44:40 PM	Program started normally
5/30/2010	2:44:41 PM	Helium valve closed
5/30/2010	2:44:41 PM	H2 valve closed
5/30/2010	2:44:41 PM	BCl3 valve closed
5/30/2010	2:44:41 PM	PH3 valve closed
5/30/2010	2:44:41 PM	SiCl4 pre valve closed
5/30/2010	2:44:41 PM	SiCl4 post valve closed
5/30/2010	2:44:41 PM	Main Vac valve closed
5/30/2010	2:44:41 PM	Bypass valve closed
5/30/2010	2:44:41 PM	Bubbler valve closed
5/30/2010	2:44:41 PM	Helium MFC set to  0.000000
5/30/2010	2:44:41 PM	H2 MFC set to  0.000000
5/30/2010	2:44:41 PM	BCl3 MFC set to  0.000000
5/30/2010	2:44:41 PM	PHl3 MFC set to  0.000000
5/30/2010	2:44:41 PM	SiCl4 MFC set to  0.000000
5/30/2010	2:44:41 PM	Bypass solenoid MFC set to  760.000000
5/30/2010	2:44:41 PM	Tube furnace set to 0
5/30/2010	2:44:47 PM	Bypass valve opened
5/30/2010	2:44:47 PM	Main Vac valve opened
5/30/2010	2:45:24 PM	Recipe started at 2:45 PM
5/30/2010	2:45:24 PM	Helium valve closed
5/30/2010	2:45:24 PM	BCl3 valve closed
5/30/2010	2:45:24 PM	PH3 valve closed
5/30/2010	2:45:24 PM	SiCl4 pre valve closed
5/30/2010	2:45:24 PM	SiCl4 post valve closed
5/30/2010	2:45:24 PM	Main Vac valve closed
5/30/2010	2:45:24 PM	Bypass valve closed
5/30/2010	2:45:24 PM	Bubbler valve closed
5/30/2010	2:45:24 PM	H2 valve opened
5/30/2010	2:45:24 PM	Helium MFC set to  0.000000
5/30/2010	2:45:24 PM	H2 MFC set to  500.000000
5/30/2010	2:45:24 PM	BCl3 MFC set to  0.000000
5/30/2010	2:45:24 PM	PHl3 MFC set to  0.000000
5/30/2010	2:45:24 PM	SiCl4 MFC set to  0.000000
5/30/2010	2:45:24 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	2:45:25 PM	Tube furnace set to 0
5/30/2010	2:46:45 PM	Helium valve closed
5/30/2010	2:46:45 PM	BCl3 valve closed
5/30/2010	2:46:45 PM	PH3 valve closed
5/30/2010	2:46:45 PM	SiCl4 pre valve closed
5/30/2010	2:46:45 PM	SiCl4 post valve closed
5/30/2010	2:46:45 PM	Main Vac valve closed
5/30/2010	2:46:45 PM	Bypass valve closed
5/30/2010	2:46:45 PM	H2 valve opened
5/30/2010	2:46:45 PM	Bubbler valve opened
5/30/2010	2:46:45 PM	Helium MFC set to  0.000000
5/30/2010	2:46:45 PM	H2 MFC set to  500.000000
5/30/2010	2:46:45 PM	BCl3 MFC set to  0.000000
5/30/2010	2:46:45 PM	PHl3 MFC set to  0.000000
5/30/2010	2:46:45 PM	SiCl4 MFC set to  0.000000
5/30/2010	2:46:45 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	2:46:45 PM	Tube furnace set to 1000
5/30/2010	3:06:45 PM	Helium valve closed
5/30/2010	3:06:45 PM	PH3 valve closed
5/30/2010	3:06:45 PM	Main Vac valve closed
5/30/2010	3:06:45 PM	Bypass valve closed
5/30/2010	3:06:45 PM	H2 valve opened
5/30/2010	3:06:45 PM	BCl3 valve opened
5/30/2010	3:06:45 PM	SiCl4 pre valve opened
5/30/2010	3:06:45 PM	SiCl4 post valve opened
5/30/2010	3:06:45 PM	Bubbler valve opened
5/30/2010	3:06:45 PM	Helium MFC set to  0.000000
5/30/2010	3:06:45 PM	H2 MFC set to  500.000000
5/30/2010	3:06:45 PM	BCl3 MFC set to  35.000000
5/30/2010	3:06:45 PM	PHl3 MFC set to  0.000000
5/30/2010	3:06:45 PM	SiCl4 MFC set to  50.000000
5/30/2010	3:06:45 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	3:06:45 PM	Tube furnace set to 1000
5/30/2010	3:18:45 PM	H2 valve closed
5/30/2010	3:18:45 PM	BCl3 valve closed
5/30/2010	3:18:45 PM	PH3 valve closed
5/30/2010	3:18:45 PM	SiCl4 pre valve closed
5/30/2010	3:18:45 PM	SiCl4 post valve closed
5/30/2010	3:18:45 PM	Main Vac valve closed
5/30/2010	3:18:45 PM	Bypass valve closed
5/30/2010	3:18:45 PM	Helium valve opened
5/30/2010	3:18:45 PM	Bubbler valve opened
5/30/2010	3:18:45 PM	Helium MFC set to  500.000000
5/30/2010	3:18:45 PM	H2 MFC set to  0.000000
5/30/2010	3:18:45 PM	BCl3 MFC set to  0.000000
5/30/2010	3:18:45 PM	PHl3 MFC set to  0.000000
5/30/2010	3:18:45 PM	SiCl4 MFC set to  0.000000
5/30/2010	3:18:45 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	3:18:45 PM	Tube furnace set to 0
5/30/2010	3:38:45 PM	Helium valve closed
5/30/2010	3:38:45 PM	H2 valve closed
5/30/2010	3:38:45 PM	BCl3 valve closed
5/30/2010	3:38:45 PM	PH3 valve closed
5/30/2010	3:38:45 PM	SiCl4 pre valve closed
5/30/2010	3:38:45 PM	SiCl4 post valve closed
5/30/2010	3:38:45 PM	Main Vac valve closed
5/30/2010	3:38:45 PM	Bypass valve closed
5/30/2010	3:38:45 PM	Bubbler valve closed
5/30/2010	3:38:45 PM	Helium MFC set to  0.000000
5/30/2010	3:38:45 PM	H2 MFC set to  0.000000
5/30/2010	3:38:45 PM	BCl3 MFC set to  0.000000
5/30/2010	3:38:45 PM	PHl3 MFC set to  0.000000
5/30/2010	3:38:45 PM	SiCl4 MFC set to  0.000000
5/30/2010	3:38:45 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	3:38:45 PM	Tube furnace set to 0
5/30/2010	3:38:45 PM	Run finished at 3:38 PM
5/30/2010	3:43:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2010	3:43:29 PM	Recipe started at 3:43 PM
5/30/2010	3:43:29 PM	Helium valve closed
5/30/2010	3:43:29 PM	H2 valve closed
5/30/2010	3:43:29 PM	BCl3 valve closed
5/30/2010	3:43:29 PM	PH3 valve closed
5/30/2010	3:43:29 PM	SiCl4 pre valve closed
5/30/2010	3:43:29 PM	SiCl4 post valve closed
5/30/2010	3:43:29 PM	Main Vac valve closed
5/30/2010	3:43:29 PM	Bubbler valve closed
5/30/2010	3:43:29 PM	Bypass valve opened
5/30/2010	3:43:29 PM	Helium MFC set to  0.000000
5/30/2010	3:43:29 PM	H2 MFC set to  0.000000
5/30/2010	3:43:29 PM	BCl3 MFC set to  0.000000
5/30/2010	3:43:29 PM	PHl3 MFC set to  0.000000
5/30/2010	3:43:29 PM	SiCl4 MFC set to  0.000000
5/30/2010	3:43:29 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	3:43:29 PM	Tube furnace set to 0
5/30/2010	3:44:17 PM	Helium valve closed
5/30/2010	3:44:17 PM	H2 valve closed
5/30/2010	3:44:17 PM	BCl3 valve closed
5/30/2010	3:44:17 PM	PH3 valve closed
5/30/2010	3:44:17 PM	SiCl4 pre valve closed
5/30/2010	3:44:17 PM	SiCl4 post valve closed
5/30/2010	3:44:17 PM	Bubbler valve closed
5/30/2010	3:44:17 PM	Main Vac valve opened
5/30/2010	3:44:17 PM	Bypass valve opened
5/30/2010	3:44:17 PM	Helium MFC set to  0.000000
5/30/2010	3:44:17 PM	H2 MFC set to  0.000000
5/30/2010	3:44:17 PM	BCl3 MFC set to  0.000000
5/30/2010	3:44:17 PM	PHl3 MFC set to  0.000000
5/30/2010	3:44:17 PM	SiCl4 MFC set to  0.000000
5/30/2010	3:44:17 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	3:44:17 PM	Tube furnace set to 0
5/30/2010	3:44:18 PM	Run finished at 3:44 PM
5/30/2010	3:44:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2010	3:45:02 PM	Bypass valve closed
5/30/2010	3:45:03 PM	Main Vac valve closed
5/30/2010	3:45:07 PM	Main Vac valve opened
5/30/2010	3:45:08 PM	Bypass valve opened
5/30/2010	3:45:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/30/2010	3:45:15 PM	Recipe started at 3:45 PM
5/30/2010	3:45:15 PM	H2 valve closed
5/30/2010	3:45:15 PM	BCl3 valve closed
5/30/2010	3:45:15 PM	PH3 valve closed
5/30/2010	3:45:15 PM	SiCl4 pre valve closed
5/30/2010	3:45:15 PM	SiCl4 post valve closed
5/30/2010	3:45:15 PM	Main Vac valve closed
5/30/2010	3:45:15 PM	Bypass valve closed
5/30/2010	3:45:15 PM	Bubbler valve closed
5/30/2010	3:45:15 PM	Helium valve opened
5/30/2010	3:45:15 PM	Helium MFC set to  500.000000
5/30/2010	3:45:15 PM	H2 MFC set to  0.000000
5/30/2010	3:45:15 PM	BCl3 MFC set to  0.000000
5/30/2010	3:45:15 PM	PHl3 MFC set to  0.000000
5/30/2010	3:45:15 PM	SiCl4 MFC set to  0.000000
5/30/2010	3:45:15 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	3:45:15 PM	Tube furnace set to 0
5/30/2010	3:46:35 PM	Helium valve closed
5/30/2010	3:46:35 PM	H2 valve closed
5/30/2010	3:46:35 PM	BCl3 valve closed
5/30/2010	3:46:35 PM	PH3 valve closed
5/30/2010	3:46:35 PM	SiCl4 pre valve closed
5/30/2010	3:46:35 PM	SiCl4 post valve closed
5/30/2010	3:46:35 PM	Main Vac valve closed
5/30/2010	3:46:35 PM	Bypass valve closed
5/30/2010	3:46:35 PM	Bubbler valve closed
5/30/2010	3:46:35 PM	Helium MFC set to  0.000000
5/30/2010	3:46:35 PM	H2 MFC set to  0.000000
5/30/2010	3:46:35 PM	BCl3 MFC set to  0.000000
5/30/2010	3:46:35 PM	PHl3 MFC set to  0.000000
5/30/2010	3:46:35 PM	SiCl4 MFC set to  0.000000
5/30/2010	3:46:35 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	3:46:35 PM	Tube furnace set to 0
5/30/2010	3:46:50 PM	Helium valve closed
5/30/2010	3:46:50 PM	H2 valve closed
5/30/2010	3:46:50 PM	BCl3 valve closed
5/30/2010	3:46:50 PM	PH3 valve closed
5/30/2010	3:46:50 PM	SiCl4 pre valve closed
5/30/2010	3:46:50 PM	SiCl4 post valve closed
5/30/2010	3:46:50 PM	Main Vac valve closed
5/30/2010	3:46:50 PM	Bubbler valve closed
5/30/2010	3:46:50 PM	Bypass valve opened
5/30/2010	3:46:50 PM	Helium MFC set to  0.000000
5/30/2010	3:46:50 PM	H2 MFC set to  0.000000
5/30/2010	3:46:50 PM	BCl3 MFC set to  0.000000
5/30/2010	3:46:50 PM	PHl3 MFC set to  0.000000
5/30/2010	3:46:50 PM	SiCl4 MFC set to  0.000000
5/30/2010	3:46:50 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	3:46:50 PM	Tube furnace set to 0
5/30/2010	3:47:23 PM	Helium valve closed
5/30/2010	3:47:23 PM	H2 valve closed
5/30/2010	3:47:23 PM	BCl3 valve closed
5/30/2010	3:47:23 PM	PH3 valve closed
5/30/2010	3:47:23 PM	SiCl4 pre valve closed
5/30/2010	3:47:23 PM	SiCl4 post valve closed
5/30/2010	3:47:23 PM	Bubbler valve closed
5/30/2010	3:47:23 PM	Main Vac valve opened
5/30/2010	3:47:23 PM	Bypass valve opened
5/30/2010	3:47:23 PM	Helium MFC set to  0.000000
5/30/2010	3:47:23 PM	H2 MFC set to  0.000000
5/30/2010	3:47:23 PM	BCl3 MFC set to  0.000000
5/30/2010	3:47:23 PM	PHl3 MFC set to  0.000000
5/30/2010	3:47:23 PM	SiCl4 MFC set to  0.000000
5/30/2010	3:47:23 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	3:47:23 PM	Tube furnace set to 0
5/30/2010	3:52:23 PM	H2 valve closed
5/30/2010	3:52:23 PM	BCl3 valve closed
5/30/2010	3:52:23 PM	PH3 valve closed
5/30/2010	3:52:23 PM	SiCl4 pre valve closed
5/30/2010	3:52:23 PM	SiCl4 post valve closed
5/30/2010	3:52:23 PM	Main Vac valve closed
5/30/2010	3:52:23 PM	Bypass valve closed
5/30/2010	3:52:23 PM	Bubbler valve closed
5/30/2010	3:52:23 PM	Helium valve opened
5/30/2010	3:52:23 PM	Helium MFC set to  500.000000
5/30/2010	3:52:23 PM	H2 MFC set to  0.000000
5/30/2010	3:52:23 PM	BCl3 MFC set to  0.000000
5/30/2010	3:52:23 PM	PHl3 MFC set to  0.000000
5/30/2010	3:52:23 PM	SiCl4 MFC set to  0.000000
5/30/2010	3:52:23 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	3:52:23 PM	Tube furnace set to 0
5/30/2010	3:53:41 PM	Helium valve closed
5/30/2010	3:53:41 PM	H2 valve closed
5/30/2010	3:53:41 PM	BCl3 valve closed
5/30/2010	3:53:41 PM	PH3 valve closed
5/30/2010	3:53:41 PM	SiCl4 pre valve closed
5/30/2010	3:53:41 PM	SiCl4 post valve closed
5/30/2010	3:53:41 PM	Main Vac valve closed
5/30/2010	3:53:41 PM	Bypass valve closed
5/30/2010	3:53:41 PM	Bubbler valve closed
5/30/2010	3:53:41 PM	Helium MFC set to  0.000000
5/30/2010	3:53:41 PM	H2 MFC set to  0.000000
5/30/2010	3:53:41 PM	BCl3 MFC set to  0.000000
5/30/2010	3:53:41 PM	PHl3 MFC set to  0.000000
5/30/2010	3:53:41 PM	SiCl4 MFC set to  0.000000
5/30/2010	3:53:41 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	3:53:42 PM	Tube furnace set to 0
5/30/2010	3:53:57 PM	Helium valve closed
5/30/2010	3:53:57 PM	H2 valve closed
5/30/2010	3:53:57 PM	BCl3 valve closed
5/30/2010	3:53:57 PM	PH3 valve closed
5/30/2010	3:53:57 PM	SiCl4 pre valve closed
5/30/2010	3:53:57 PM	SiCl4 post valve closed
5/30/2010	3:53:57 PM	Main Vac valve closed
5/30/2010	3:53:57 PM	Bubbler valve closed
5/30/2010	3:53:57 PM	Bypass valve opened
5/30/2010	3:53:57 PM	Helium MFC set to  0.000000
5/30/2010	3:53:57 PM	H2 MFC set to  0.000000
5/30/2010	3:53:57 PM	BCl3 MFC set to  0.000000
5/30/2010	3:53:57 PM	PHl3 MFC set to  0.000000
5/30/2010	3:53:57 PM	SiCl4 MFC set to  0.000000
5/30/2010	3:53:57 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	3:53:57 PM	Tube furnace set to 0
5/30/2010	3:54:29 PM	Helium valve closed
5/30/2010	3:54:29 PM	H2 valve closed
5/30/2010	3:54:29 PM	BCl3 valve closed
5/30/2010	3:54:29 PM	PH3 valve closed
5/30/2010	3:54:29 PM	SiCl4 pre valve closed
5/30/2010	3:54:29 PM	SiCl4 post valve closed
5/30/2010	3:54:29 PM	Bubbler valve closed
5/30/2010	3:54:29 PM	Main Vac valve opened
5/30/2010	3:54:29 PM	Bypass valve opened
5/30/2010	3:54:29 PM	Helium MFC set to  0.000000
5/30/2010	3:54:29 PM	H2 MFC set to  0.000000
5/30/2010	3:54:29 PM	BCl3 MFC set to  0.000000
5/30/2010	3:54:29 PM	PHl3 MFC set to  0.000000
5/30/2010	3:54:29 PM	SiCl4 MFC set to  0.000000
5/30/2010	3:54:29 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	3:54:29 PM	Tube furnace set to 0
5/30/2010	3:59:29 PM	H2 valve closed
5/30/2010	3:59:29 PM	BCl3 valve closed
5/30/2010	3:59:29 PM	PH3 valve closed
5/30/2010	3:59:29 PM	SiCl4 pre valve closed
5/30/2010	3:59:29 PM	SiCl4 post valve closed
5/30/2010	3:59:29 PM	Main Vac valve closed
5/30/2010	3:59:29 PM	Bypass valve closed
5/30/2010	3:59:29 PM	Bubbler valve closed
5/30/2010	3:59:29 PM	Helium valve opened
5/30/2010	3:59:29 PM	Helium MFC set to  500.000000
5/30/2010	3:59:29 PM	H2 MFC set to  0.000000
5/30/2010	3:59:29 PM	BCl3 MFC set to  0.000000
5/30/2010	3:59:29 PM	PHl3 MFC set to  0.000000
5/30/2010	3:59:29 PM	SiCl4 MFC set to  0.000000
5/30/2010	3:59:29 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	3:59:29 PM	Tube furnace set to 0
5/30/2010	4:00:47 PM	Helium valve closed
5/30/2010	4:00:47 PM	H2 valve closed
5/30/2010	4:00:47 PM	BCl3 valve closed
5/30/2010	4:00:47 PM	PH3 valve closed
5/30/2010	4:00:47 PM	SiCl4 pre valve closed
5/30/2010	4:00:47 PM	SiCl4 post valve closed
5/30/2010	4:00:47 PM	Main Vac valve closed
5/30/2010	4:00:47 PM	Bypass valve closed
5/30/2010	4:00:47 PM	Bubbler valve closed
5/30/2010	4:00:47 PM	Helium MFC set to  0.000000
5/30/2010	4:00:47 PM	H2 MFC set to  0.000000
5/30/2010	4:00:47 PM	BCl3 MFC set to  0.000000
5/30/2010	4:00:47 PM	PHl3 MFC set to  0.000000
5/30/2010	4:00:47 PM	SiCl4 MFC set to  0.000000
5/30/2010	4:00:47 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	4:00:48 PM	Tube furnace set to 0
5/30/2010	4:01:03 PM	Helium valve closed
5/30/2010	4:01:03 PM	H2 valve closed
5/30/2010	4:01:03 PM	BCl3 valve closed
5/30/2010	4:01:03 PM	PH3 valve closed
5/30/2010	4:01:03 PM	SiCl4 pre valve closed
5/30/2010	4:01:03 PM	SiCl4 post valve closed
5/30/2010	4:01:03 PM	Main Vac valve closed
5/30/2010	4:01:03 PM	Bubbler valve closed
5/30/2010	4:01:03 PM	Bypass valve opened
5/30/2010	4:01:03 PM	Helium MFC set to  0.000000
5/30/2010	4:01:03 PM	H2 MFC set to  0.000000
5/30/2010	4:01:03 PM	BCl3 MFC set to  0.000000
5/30/2010	4:01:03 PM	PHl3 MFC set to  0.000000
5/30/2010	4:01:03 PM	SiCl4 MFC set to  0.000000
5/30/2010	4:01:03 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	4:01:03 PM	Tube furnace set to 0
5/30/2010	4:01:35 PM	Helium valve closed
5/30/2010	4:01:35 PM	H2 valve closed
5/30/2010	4:01:35 PM	BCl3 valve closed
5/30/2010	4:01:35 PM	PH3 valve closed
5/30/2010	4:01:35 PM	SiCl4 pre valve closed
5/30/2010	4:01:35 PM	SiCl4 post valve closed
5/30/2010	4:01:35 PM	Bubbler valve closed
5/30/2010	4:01:35 PM	Main Vac valve opened
5/30/2010	4:01:35 PM	Bypass valve opened
5/30/2010	4:01:35 PM	Helium MFC set to  0.000000
5/30/2010	4:01:35 PM	H2 MFC set to  0.000000
5/30/2010	4:01:35 PM	BCl3 MFC set to  0.000000
5/30/2010	4:01:35 PM	PHl3 MFC set to  0.000000
5/30/2010	4:01:35 PM	SiCl4 MFC set to  0.000000
5/30/2010	4:01:35 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	4:01:35 PM	Tube furnace set to 0
5/30/2010	4:06:35 PM	Helium valve closed
5/30/2010	4:06:35 PM	H2 valve closed
5/30/2010	4:06:35 PM	BCl3 valve closed
5/30/2010	4:06:35 PM	PH3 valve closed
5/30/2010	4:06:35 PM	SiCl4 pre valve closed
5/30/2010	4:06:35 PM	SiCl4 post valve closed
5/30/2010	4:06:35 PM	Bubbler valve closed
5/30/2010	4:06:35 PM	Main Vac valve opened
5/30/2010	4:06:35 PM	Bypass valve opened
5/30/2010	4:06:35 PM	Helium MFC set to  0.000000
5/30/2010	4:06:35 PM	H2 MFC set to  0.000000
5/30/2010	4:06:35 PM	BCl3 MFC set to  0.000000
5/30/2010	4:06:35 PM	PHl3 MFC set to  0.000000
5/30/2010	4:06:35 PM	SiCl4 MFC set to  0.000000
5/30/2010	4:06:35 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	4:06:35 PM	Tube furnace set to 0
5/30/2010	4:06:36 PM	Run finished at 4:06 PM
5/30/2010	4:06:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/30/2010	6:43:41 PM	Bypass valve closed
5/30/2010	6:43:41 PM	Main Vac valve closed
5/30/2010	6:43:51 PM	Main Vac valve opened
5/30/2010	6:43:52 PM	Bypass valve opened
5/30/2010	6:44:40 PM	Recipe started at 6:44 PM
5/30/2010	6:44:40 PM	Helium valve closed
5/30/2010	6:44:40 PM	BCl3 valve closed
5/30/2010	6:44:40 PM	PH3 valve closed
5/30/2010	6:44:40 PM	SiCl4 pre valve closed
5/30/2010	6:44:40 PM	SiCl4 post valve closed
5/30/2010	6:44:40 PM	Main Vac valve closed
5/30/2010	6:44:40 PM	Bypass valve closed
5/30/2010	6:44:40 PM	Bubbler valve closed
5/30/2010	6:44:40 PM	H2 valve opened
5/30/2010	6:44:40 PM	Helium MFC set to  0.000000
5/30/2010	6:44:40 PM	H2 MFC set to  500.000000
5/30/2010	6:44:40 PM	BCl3 MFC set to  0.000000
5/30/2010	6:44:40 PM	PHl3 MFC set to  0.000000
5/30/2010	6:44:40 PM	SiCl4 MFC set to  0.000000
5/30/2010	6:44:40 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	6:44:40 PM	Tube furnace set to 0
5/30/2010	6:46:02 PM	Helium valve closed
5/30/2010	6:46:02 PM	BCl3 valve closed
5/30/2010	6:46:02 PM	PH3 valve closed
5/30/2010	6:46:02 PM	SiCl4 pre valve closed
5/30/2010	6:46:02 PM	SiCl4 post valve closed
5/30/2010	6:46:02 PM	Main Vac valve closed
5/30/2010	6:46:02 PM	Bypass valve closed
5/30/2010	6:46:02 PM	H2 valve opened
5/30/2010	6:46:02 PM	Bubbler valve opened
5/30/2010	6:46:02 PM	Helium MFC set to  0.000000
5/30/2010	6:46:02 PM	H2 MFC set to  500.000000
5/30/2010	6:46:02 PM	BCl3 MFC set to  0.000000
5/30/2010	6:46:02 PM	PHl3 MFC set to  0.000000
5/30/2010	6:46:02 PM	SiCl4 MFC set to  0.000000
5/30/2010	6:46:02 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	6:46:02 PM	Tube furnace set to 1000
5/30/2010	7:06:02 PM	Helium valve closed
5/30/2010	7:06:02 PM	PH3 valve closed
5/30/2010	7:06:02 PM	Main Vac valve closed
5/30/2010	7:06:02 PM	Bypass valve closed
5/30/2010	7:06:02 PM	H2 valve opened
5/30/2010	7:06:02 PM	BCl3 valve opened
5/30/2010	7:06:02 PM	SiCl4 pre valve opened
5/30/2010	7:06:02 PM	SiCl4 post valve opened
5/30/2010	7:06:02 PM	Bubbler valve opened
5/30/2010	7:06:02 PM	Helium MFC set to  0.000000
5/30/2010	7:06:02 PM	H2 MFC set to  500.000000
5/30/2010	7:06:02 PM	BCl3 MFC set to  35.000000
5/30/2010	7:06:02 PM	PHl3 MFC set to  0.000000
5/30/2010	7:06:02 PM	SiCl4 MFC set to  50.000000
5/30/2010	7:06:02 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	7:06:02 PM	Tube furnace set to 1000
5/30/2010	7:18:02 PM	H2 valve closed
5/30/2010	7:18:02 PM	BCl3 valve closed
5/30/2010	7:18:02 PM	PH3 valve closed
5/30/2010	7:18:02 PM	SiCl4 pre valve closed
5/30/2010	7:18:02 PM	SiCl4 post valve closed
5/30/2010	7:18:02 PM	Main Vac valve closed
5/30/2010	7:18:02 PM	Bypass valve closed
5/30/2010	7:18:02 PM	Helium valve opened
5/30/2010	7:18:02 PM	Bubbler valve opened
5/30/2010	7:18:02 PM	Helium MFC set to  500.000000
5/30/2010	7:18:02 PM	H2 MFC set to  0.000000
5/30/2010	7:18:02 PM	BCl3 MFC set to  0.000000
5/30/2010	7:18:02 PM	PHl3 MFC set to  0.000000
5/30/2010	7:18:02 PM	SiCl4 MFC set to  0.000000
5/30/2010	7:18:02 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	7:18:02 PM	Tube furnace set to 0
5/30/2010	7:38:02 PM	Helium valve closed
5/30/2010	7:38:02 PM	H2 valve closed
5/30/2010	7:38:02 PM	BCl3 valve closed
5/30/2010	7:38:02 PM	PH3 valve closed
5/30/2010	7:38:02 PM	SiCl4 pre valve closed
5/30/2010	7:38:02 PM	SiCl4 post valve closed
5/30/2010	7:38:02 PM	Main Vac valve closed
5/30/2010	7:38:02 PM	Bypass valve closed
5/30/2010	7:38:02 PM	Bubbler valve closed
5/30/2010	7:38:02 PM	Helium MFC set to  0.000000
5/30/2010	7:38:02 PM	H2 MFC set to  0.000000
5/30/2010	7:38:02 PM	BCl3 MFC set to  0.000000
5/30/2010	7:38:02 PM	PHl3 MFC set to  0.000000
5/30/2010	7:38:02 PM	SiCl4 MFC set to  0.000000
5/30/2010	7:38:02 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	7:38:02 PM	Tube furnace set to 0
5/30/2010	7:38:03 PM	Run finished at 7:38 PM
5/30/2010	7:48:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2010	7:48:28 PM	Recipe started at 7:48 PM
5/30/2010	7:48:28 PM	Helium valve closed
5/30/2010	7:48:28 PM	H2 valve closed
5/30/2010	7:48:28 PM	BCl3 valve closed
5/30/2010	7:48:28 PM	PH3 valve closed
5/30/2010	7:48:28 PM	SiCl4 pre valve closed
5/30/2010	7:48:28 PM	SiCl4 post valve closed
5/30/2010	7:48:28 PM	Main Vac valve closed
5/30/2010	7:48:28 PM	Bubbler valve closed
5/30/2010	7:48:28 PM	Bypass valve opened
5/30/2010	7:48:28 PM	Helium MFC set to  0.000000
5/30/2010	7:48:28 PM	H2 MFC set to  0.000000
5/30/2010	7:48:28 PM	BCl3 MFC set to  0.000000
5/30/2010	7:48:28 PM	PHl3 MFC set to  0.000000
5/30/2010	7:48:28 PM	SiCl4 MFC set to  0.000000
5/30/2010	7:48:28 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	7:48:28 PM	Tube furnace set to 0
5/30/2010	7:49:13 PM	Helium valve closed
5/30/2010	7:49:13 PM	H2 valve closed
5/30/2010	7:49:13 PM	BCl3 valve closed
5/30/2010	7:49:13 PM	PH3 valve closed
5/30/2010	7:49:13 PM	SiCl4 pre valve closed
5/30/2010	7:49:13 PM	SiCl4 post valve closed
5/30/2010	7:49:13 PM	Bubbler valve closed
5/30/2010	7:49:13 PM	Main Vac valve opened
5/30/2010	7:49:13 PM	Bypass valve opened
5/30/2010	7:49:13 PM	Helium MFC set to  0.000000
5/30/2010	7:49:13 PM	H2 MFC set to  0.000000
5/30/2010	7:49:13 PM	BCl3 MFC set to  0.000000
5/30/2010	7:49:13 PM	PHl3 MFC set to  0.000000
5/30/2010	7:49:13 PM	SiCl4 MFC set to  0.000000
5/30/2010	7:49:13 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	7:49:13 PM	Tube furnace set to 0
5/30/2010	7:49:13 PM	Run finished at 7:49 PM
5/30/2010	7:49:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2010	7:51:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/30/2010	7:51:32 PM	Recipe started at 7:51 PM
5/30/2010	7:51:32 PM	H2 valve closed
5/30/2010	7:51:32 PM	BCl3 valve closed
5/30/2010	7:51:32 PM	PH3 valve closed
5/30/2010	7:51:32 PM	SiCl4 pre valve closed
5/30/2010	7:51:32 PM	SiCl4 post valve closed
5/30/2010	7:51:32 PM	Main Vac valve closed
5/30/2010	7:51:32 PM	Bypass valve closed
5/30/2010	7:51:32 PM	Bubbler valve closed
5/30/2010	7:51:32 PM	Helium valve opened
5/30/2010	7:51:32 PM	Helium MFC set to  500.000000
5/30/2010	7:51:32 PM	H2 MFC set to  0.000000
5/30/2010	7:51:32 PM	BCl3 MFC set to  0.000000
5/30/2010	7:51:32 PM	PHl3 MFC set to  0.000000
5/30/2010	7:51:32 PM	SiCl4 MFC set to  0.000000
5/30/2010	7:51:32 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	7:51:32 PM	Tube furnace set to 0
5/30/2010	7:52:48 PM	Helium valve closed
5/30/2010	7:52:48 PM	H2 valve closed
5/30/2010	7:52:48 PM	BCl3 valve closed
5/30/2010	7:52:48 PM	PH3 valve closed
5/30/2010	7:52:48 PM	SiCl4 pre valve closed
5/30/2010	7:52:48 PM	SiCl4 post valve closed
5/30/2010	7:52:48 PM	Main Vac valve closed
5/30/2010	7:52:48 PM	Bypass valve closed
5/30/2010	7:52:48 PM	Bubbler valve closed
5/30/2010	7:52:48 PM	Helium MFC set to  0.000000
5/30/2010	7:52:48 PM	H2 MFC set to  0.000000
5/30/2010	7:52:48 PM	BCl3 MFC set to  0.000000
5/30/2010	7:52:48 PM	PHl3 MFC set to  0.000000
5/30/2010	7:52:48 PM	SiCl4 MFC set to  0.000000
5/30/2010	7:52:48 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	7:52:48 PM	Tube furnace set to 0
5/30/2010	7:53:03 PM	Helium valve closed
5/30/2010	7:53:03 PM	H2 valve closed
5/30/2010	7:53:03 PM	BCl3 valve closed
5/30/2010	7:53:03 PM	PH3 valve closed
5/30/2010	7:53:03 PM	SiCl4 pre valve closed
5/30/2010	7:53:03 PM	SiCl4 post valve closed
5/30/2010	7:53:03 PM	Main Vac valve closed
5/30/2010	7:53:03 PM	Bubbler valve closed
5/30/2010	7:53:03 PM	Bypass valve opened
5/30/2010	7:53:03 PM	Helium MFC set to  0.000000
5/30/2010	7:53:03 PM	H2 MFC set to  0.000000
5/30/2010	7:53:03 PM	BCl3 MFC set to  0.000000
5/30/2010	7:53:03 PM	PHl3 MFC set to  0.000000
5/30/2010	7:53:03 PM	SiCl4 MFC set to  0.000000
5/30/2010	7:53:03 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	7:53:03 PM	Tube furnace set to 0
5/30/2010	7:53:34 PM	Helium valve closed
5/30/2010	7:53:34 PM	H2 valve closed
5/30/2010	7:53:34 PM	BCl3 valve closed
5/30/2010	7:53:34 PM	PH3 valve closed
5/30/2010	7:53:34 PM	SiCl4 pre valve closed
5/30/2010	7:53:34 PM	SiCl4 post valve closed
5/30/2010	7:53:34 PM	Bubbler valve closed
5/30/2010	7:53:34 PM	Main Vac valve opened
5/30/2010	7:53:34 PM	Bypass valve opened
5/30/2010	7:53:34 PM	Helium MFC set to  0.000000
5/30/2010	7:53:34 PM	H2 MFC set to  0.000000
5/30/2010	7:53:34 PM	BCl3 MFC set to  0.000000
5/30/2010	7:53:34 PM	PHl3 MFC set to  0.000000
5/30/2010	7:53:34 PM	SiCl4 MFC set to  0.000000
5/30/2010	7:53:34 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	7:53:34 PM	Tube furnace set to 0
5/30/2010	7:58:34 PM	H2 valve closed
5/30/2010	7:58:34 PM	BCl3 valve closed
5/30/2010	7:58:34 PM	PH3 valve closed
5/30/2010	7:58:34 PM	SiCl4 pre valve closed
5/30/2010	7:58:34 PM	SiCl4 post valve closed
5/30/2010	7:58:34 PM	Main Vac valve closed
5/30/2010	7:58:34 PM	Bypass valve closed
5/30/2010	7:58:34 PM	Bubbler valve closed
5/30/2010	7:58:34 PM	Helium valve opened
5/30/2010	7:58:34 PM	Helium MFC set to  500.000000
5/30/2010	7:58:34 PM	H2 MFC set to  0.000000
5/30/2010	7:58:34 PM	BCl3 MFC set to  0.000000
5/30/2010	7:58:34 PM	PHl3 MFC set to  0.000000
5/30/2010	7:58:34 PM	SiCl4 MFC set to  0.000000
5/30/2010	7:58:34 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	7:58:34 PM	Tube furnace set to 0
5/30/2010	7:59:50 PM	Helium valve closed
5/30/2010	7:59:50 PM	H2 valve closed
5/30/2010	7:59:50 PM	BCl3 valve closed
5/30/2010	7:59:50 PM	PH3 valve closed
5/30/2010	7:59:50 PM	SiCl4 pre valve closed
5/30/2010	7:59:50 PM	SiCl4 post valve closed
5/30/2010	7:59:50 PM	Main Vac valve closed
5/30/2010	7:59:50 PM	Bypass valve closed
5/30/2010	7:59:50 PM	Bubbler valve closed
5/30/2010	7:59:50 PM	Helium MFC set to  0.000000
5/30/2010	7:59:50 PM	H2 MFC set to  0.000000
5/30/2010	7:59:50 PM	BCl3 MFC set to  0.000000
5/30/2010	7:59:50 PM	PHl3 MFC set to  0.000000
5/30/2010	7:59:50 PM	SiCl4 MFC set to  0.000000
5/30/2010	7:59:50 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	7:59:50 PM	Tube furnace set to 0
5/30/2010	8:00:05 PM	Helium valve closed
5/30/2010	8:00:05 PM	H2 valve closed
5/30/2010	8:00:05 PM	BCl3 valve closed
5/30/2010	8:00:05 PM	PH3 valve closed
5/30/2010	8:00:05 PM	SiCl4 pre valve closed
5/30/2010	8:00:05 PM	SiCl4 post valve closed
5/30/2010	8:00:05 PM	Main Vac valve closed
5/30/2010	8:00:05 PM	Bubbler valve closed
5/30/2010	8:00:05 PM	Bypass valve opened
5/30/2010	8:00:05 PM	Helium MFC set to  0.000000
5/30/2010	8:00:05 PM	H2 MFC set to  0.000000
5/30/2010	8:00:05 PM	BCl3 MFC set to  0.000000
5/30/2010	8:00:05 PM	PHl3 MFC set to  0.000000
5/30/2010	8:00:05 PM	SiCl4 MFC set to  0.000000
5/30/2010	8:00:05 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	8:00:05 PM	Tube furnace set to 0
5/30/2010	8:00:36 PM	Helium valve closed
5/30/2010	8:00:36 PM	H2 valve closed
5/30/2010	8:00:36 PM	BCl3 valve closed
5/30/2010	8:00:36 PM	PH3 valve closed
5/30/2010	8:00:36 PM	SiCl4 pre valve closed
5/30/2010	8:00:36 PM	SiCl4 post valve closed
5/30/2010	8:00:36 PM	Bubbler valve closed
5/30/2010	8:00:36 PM	Main Vac valve opened
5/30/2010	8:00:36 PM	Bypass valve opened
5/30/2010	8:00:36 PM	Helium MFC set to  0.000000
5/30/2010	8:00:36 PM	H2 MFC set to  0.000000
5/30/2010	8:00:36 PM	BCl3 MFC set to  0.000000
5/30/2010	8:00:36 PM	PHl3 MFC set to  0.000000
5/30/2010	8:00:36 PM	SiCl4 MFC set to  0.000000
5/30/2010	8:00:36 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	8:00:36 PM	Tube furnace set to 0
5/30/2010	8:05:36 PM	H2 valve closed
5/30/2010	8:05:36 PM	BCl3 valve closed
5/30/2010	8:05:36 PM	PH3 valve closed
5/30/2010	8:05:36 PM	SiCl4 pre valve closed
5/30/2010	8:05:36 PM	SiCl4 post valve closed
5/30/2010	8:05:36 PM	Main Vac valve closed
5/30/2010	8:05:36 PM	Bypass valve closed
5/30/2010	8:05:36 PM	Bubbler valve closed
5/30/2010	8:05:36 PM	Helium valve opened
5/30/2010	8:05:36 PM	Helium MFC set to  500.000000
5/30/2010	8:05:36 PM	H2 MFC set to  0.000000
5/30/2010	8:05:36 PM	BCl3 MFC set to  0.000000
5/30/2010	8:05:36 PM	PHl3 MFC set to  0.000000
5/30/2010	8:05:36 PM	SiCl4 MFC set to  0.000000
5/30/2010	8:05:36 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	8:05:36 PM	Tube furnace set to 0
5/30/2010	8:06:52 PM	Helium valve closed
5/30/2010	8:06:52 PM	H2 valve closed
5/30/2010	8:06:52 PM	BCl3 valve closed
5/30/2010	8:06:52 PM	PH3 valve closed
5/30/2010	8:06:52 PM	SiCl4 pre valve closed
5/30/2010	8:06:52 PM	SiCl4 post valve closed
5/30/2010	8:06:52 PM	Main Vac valve closed
5/30/2010	8:06:52 PM	Bypass valve closed
5/30/2010	8:06:52 PM	Bubbler valve closed
5/30/2010	8:06:52 PM	Helium MFC set to  0.000000
5/30/2010	8:06:52 PM	H2 MFC set to  0.000000
5/30/2010	8:06:52 PM	BCl3 MFC set to  0.000000
5/30/2010	8:06:52 PM	PHl3 MFC set to  0.000000
5/30/2010	8:06:52 PM	SiCl4 MFC set to  0.000000
5/30/2010	8:06:52 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	8:06:52 PM	Tube furnace set to 0
5/30/2010	8:07:07 PM	Helium valve closed
5/30/2010	8:07:07 PM	H2 valve closed
5/30/2010	8:07:07 PM	BCl3 valve closed
5/30/2010	8:07:07 PM	PH3 valve closed
5/30/2010	8:07:07 PM	SiCl4 pre valve closed
5/30/2010	8:07:07 PM	SiCl4 post valve closed
5/30/2010	8:07:07 PM	Main Vac valve closed
5/30/2010	8:07:07 PM	Bubbler valve closed
5/30/2010	8:07:07 PM	Bypass valve opened
5/30/2010	8:07:07 PM	Helium MFC set to  0.000000
5/30/2010	8:07:07 PM	H2 MFC set to  0.000000
5/30/2010	8:07:07 PM	BCl3 MFC set to  0.000000
5/30/2010	8:07:07 PM	PHl3 MFC set to  0.000000
5/30/2010	8:07:07 PM	SiCl4 MFC set to  0.000000
5/30/2010	8:07:07 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	8:07:07 PM	Tube furnace set to 0
5/30/2010	8:07:38 PM	Helium valve closed
5/30/2010	8:07:38 PM	H2 valve closed
5/30/2010	8:07:38 PM	BCl3 valve closed
5/30/2010	8:07:38 PM	PH3 valve closed
5/30/2010	8:07:38 PM	SiCl4 pre valve closed
5/30/2010	8:07:38 PM	SiCl4 post valve closed
5/30/2010	8:07:38 PM	Bubbler valve closed
5/30/2010	8:07:38 PM	Main Vac valve opened
5/30/2010	8:07:38 PM	Bypass valve opened
5/30/2010	8:07:38 PM	Helium MFC set to  0.000000
5/30/2010	8:07:38 PM	H2 MFC set to  0.000000
5/30/2010	8:07:38 PM	BCl3 MFC set to  0.000000
5/30/2010	8:07:38 PM	PHl3 MFC set to  0.000000
5/30/2010	8:07:38 PM	SiCl4 MFC set to  0.000000
5/30/2010	8:07:38 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	8:07:38 PM	Tube furnace set to 0
5/30/2010	8:12:38 PM	Helium valve closed
5/30/2010	8:12:38 PM	H2 valve closed
5/30/2010	8:12:38 PM	BCl3 valve closed
5/30/2010	8:12:38 PM	PH3 valve closed
5/30/2010	8:12:38 PM	SiCl4 pre valve closed
5/30/2010	8:12:38 PM	SiCl4 post valve closed
5/30/2010	8:12:38 PM	Bubbler valve closed
5/30/2010	8:12:38 PM	Main Vac valve opened
5/30/2010	8:12:38 PM	Bypass valve opened
5/30/2010	8:12:38 PM	Helium MFC set to  0.000000
5/30/2010	8:12:38 PM	H2 MFC set to  0.000000
5/30/2010	8:12:38 PM	BCl3 MFC set to  0.000000
5/30/2010	8:12:38 PM	PHl3 MFC set to  0.000000
5/30/2010	8:12:38 PM	SiCl4 MFC set to  0.000000
5/30/2010	8:12:38 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	8:12:39 PM	Tube furnace set to 0
5/30/2010	8:12:40 PM	Run finished at 8:12 PM
5/30/2010	8:12:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/30/2010	8:20:09 PM	Helium MFC set to  100.000000
5/30/2010	8:20:10 PM	Helium valve opened
5/30/2010	8:30:50 PM	Helium valve closed
5/30/2010	8:30:52 PM	Helium MFC set to  100.000000
5/30/2010	8:30:56 PM	Helium MFC set to  0.000000
5/30/2010	8:36:49 PM	Bypass valve closed
5/30/2010	8:36:50 PM	Main Vac valve closed
5/30/2010	8:36:57 PM	Bypass valve opened
5/30/2010	8:36:57 PM	Main Vac valve opened
5/30/2010	8:38:11 PM	Recipe started at 8:38 PM
5/30/2010	8:38:11 PM	Helium valve closed
5/30/2010	8:38:11 PM	BCl3 valve closed
5/30/2010	8:38:11 PM	PH3 valve closed
5/30/2010	8:38:11 PM	SiCl4 pre valve closed
5/30/2010	8:38:11 PM	SiCl4 post valve closed
5/30/2010	8:38:11 PM	Main Vac valve closed
5/30/2010	8:38:11 PM	Bypass valve closed
5/30/2010	8:38:11 PM	Bubbler valve closed
5/30/2010	8:38:11 PM	H2 valve opened
5/30/2010	8:38:11 PM	Helium MFC set to  0.000000
5/30/2010	8:38:11 PM	H2 MFC set to  500.000000
5/30/2010	8:38:11 PM	BCl3 MFC set to  0.000000
5/30/2010	8:38:11 PM	PHl3 MFC set to  0.000000
5/30/2010	8:38:11 PM	SiCl4 MFC set to  0.000000
5/30/2010	8:38:11 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	8:38:11 PM	Tube furnace set to 0
5/30/2010	8:39:29 PM	Helium valve closed
5/30/2010	8:39:29 PM	BCl3 valve closed
5/30/2010	8:39:29 PM	PH3 valve closed
5/30/2010	8:39:29 PM	SiCl4 pre valve closed
5/30/2010	8:39:29 PM	SiCl4 post valve closed
5/30/2010	8:39:29 PM	Main Vac valve closed
5/30/2010	8:39:29 PM	Bypass valve closed
5/30/2010	8:39:29 PM	H2 valve opened
5/30/2010	8:39:29 PM	Bubbler valve opened
5/30/2010	8:39:29 PM	Helium MFC set to  0.000000
5/30/2010	8:39:29 PM	H2 MFC set to  500.000000
5/30/2010	8:39:29 PM	BCl3 MFC set to  0.000000
5/30/2010	8:39:29 PM	PHl3 MFC set to  0.000000
5/30/2010	8:39:29 PM	SiCl4 MFC set to  0.000000
5/30/2010	8:39:29 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	8:39:29 PM	Tube furnace set to 1000
5/30/2010	8:46:49 PM	Helium valve closed
5/30/2010	8:46:49 PM	PH3 valve closed
5/30/2010	8:46:49 PM	Main Vac valve closed
5/30/2010	8:46:49 PM	Bypass valve closed
5/30/2010	8:46:49 PM	H2 valve opened
5/30/2010	8:46:49 PM	BCl3 valve opened
5/30/2010	8:46:49 PM	SiCl4 pre valve opened
5/30/2010	8:46:49 PM	SiCl4 post valve opened
5/30/2010	8:46:49 PM	Bubbler valve opened
5/30/2010	8:46:49 PM	Helium MFC set to  0.000000
5/30/2010	8:46:49 PM	H2 MFC set to  500.000000
5/30/2010	8:46:49 PM	BCl3 MFC set to  35.000000
5/30/2010	8:46:49 PM	PHl3 MFC set to  0.000000
5/30/2010	8:46:49 PM	SiCl4 MFC set to  50.000000
5/30/2010	8:46:49 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	8:46:49 PM	Tube furnace set to 1000
5/30/2010	8:49:56 PM	Helium valve closed
5/30/2010	8:49:56 PM	PH3 valve closed
5/30/2010	8:49:56 PM	Main Vac valve closed
5/30/2010	8:49:56 PM	Bypass valve closed
5/30/2010	8:49:56 PM	H2 valve opened
5/30/2010	8:49:56 PM	BCl3 valve opened
5/30/2010	8:49:56 PM	SiCl4 pre valve opened
5/30/2010	8:49:56 PM	SiCl4 post valve opened
5/30/2010	8:49:56 PM	Bubbler valve opened
5/30/2010	8:49:56 PM	Helium MFC set to  0.000000
5/30/2010	8:49:56 PM	H2 MFC set to  500.000000
5/30/2010	8:49:56 PM	BCl3 MFC set to  35.000000
5/30/2010	8:49:56 PM	PHl3 MFC set to  0.000000
5/30/2010	8:49:56 PM	SiCl4 MFC set to  50.000000
5/30/2010	8:49:56 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	8:49:56 PM	Tube furnace set to 1000
5/30/2010	8:54:56 PM	H2 valve closed
5/30/2010	8:54:56 PM	BCl3 valve closed
5/30/2010	8:54:56 PM	PH3 valve closed
5/30/2010	8:54:56 PM	SiCl4 pre valve closed
5/30/2010	8:54:56 PM	SiCl4 post valve closed
5/30/2010	8:54:56 PM	Main Vac valve closed
5/30/2010	8:54:56 PM	Bypass valve closed
5/30/2010	8:54:56 PM	Helium valve opened
5/30/2010	8:54:56 PM	Bubbler valve opened
5/30/2010	8:54:56 PM	Helium MFC set to  500.000000
5/30/2010	8:54:56 PM	H2 MFC set to  0.000000
5/30/2010	8:54:56 PM	BCl3 MFC set to  0.000000
5/30/2010	8:54:56 PM	PHl3 MFC set to  0.000000
5/30/2010	8:54:56 PM	SiCl4 MFC set to  0.000000
5/30/2010	8:54:56 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	8:54:56 PM	Tube furnace set to 0
5/30/2010	9:14:56 PM	Helium valve closed
5/30/2010	9:14:56 PM	H2 valve closed
5/30/2010	9:14:56 PM	BCl3 valve closed
5/30/2010	9:14:56 PM	PH3 valve closed
5/30/2010	9:14:56 PM	SiCl4 pre valve closed
5/30/2010	9:14:56 PM	SiCl4 post valve closed
5/30/2010	9:14:56 PM	Main Vac valve closed
5/30/2010	9:14:56 PM	Bypass valve closed
5/30/2010	9:14:56 PM	Bubbler valve closed
5/30/2010	9:14:56 PM	Helium MFC set to  0.000000
5/30/2010	9:14:56 PM	H2 MFC set to  0.000000
5/30/2010	9:14:56 PM	BCl3 MFC set to  0.000000
5/30/2010	9:14:56 PM	PHl3 MFC set to  0.000000
5/30/2010	9:14:56 PM	SiCl4 MFC set to  0.000000
5/30/2010	9:14:56 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	9:14:57 PM	Tube furnace set to 0
5/30/2010	9:14:57 PM	Run finished at 9:14 PM
5/30/2010	9:25:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2010	9:25:39 PM	Recipe started at 9:25 PM
5/30/2010	9:25:39 PM	Helium valve closed
5/30/2010	9:25:39 PM	H2 valve closed
5/30/2010	9:25:39 PM	BCl3 valve closed
5/30/2010	9:25:39 PM	PH3 valve closed
5/30/2010	9:25:39 PM	SiCl4 pre valve closed
5/30/2010	9:25:39 PM	SiCl4 post valve closed
5/30/2010	9:25:39 PM	Main Vac valve closed
5/30/2010	9:25:39 PM	Bubbler valve closed
5/30/2010	9:25:39 PM	Bypass valve opened
5/30/2010	9:25:39 PM	Helium MFC set to  0.000000
5/30/2010	9:25:39 PM	H2 MFC set to  0.000000
5/30/2010	9:25:39 PM	BCl3 MFC set to  0.000000
5/30/2010	9:25:39 PM	PHl3 MFC set to  0.000000
5/30/2010	9:25:39 PM	SiCl4 MFC set to  0.000000
5/30/2010	9:25:39 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	9:25:39 PM	Tube furnace set to 0
5/30/2010	9:26:28 PM	Helium valve closed
5/30/2010	9:26:28 PM	H2 valve closed
5/30/2010	9:26:28 PM	BCl3 valve closed
5/30/2010	9:26:28 PM	PH3 valve closed
5/30/2010	9:26:28 PM	SiCl4 pre valve closed
5/30/2010	9:26:28 PM	SiCl4 post valve closed
5/30/2010	9:26:28 PM	Bubbler valve closed
5/30/2010	9:26:28 PM	Main Vac valve opened
5/30/2010	9:26:28 PM	Bypass valve opened
5/30/2010	9:26:28 PM	Helium MFC set to  0.000000
5/30/2010	9:26:28 PM	H2 MFC set to  0.000000
5/30/2010	9:26:28 PM	BCl3 MFC set to  0.000000
5/30/2010	9:26:28 PM	PHl3 MFC set to  0.000000
5/30/2010	9:26:28 PM	SiCl4 MFC set to  0.000000
5/30/2010	9:26:28 PM	Bypass solenoid MFC set to  0.000000
5/30/2010	9:26:28 PM	Tube furnace set to 0
5/30/2010	9:26:28 PM	Run finished at 9:26 PM
5/30/2010	9:26:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
